QMS Applications for Materials Manufacturing - A Case Study
The Chemical Vapor Deposition (CVD) reactor was used to produce granular polysilicon. Quality management systems monitor all aspects of the business, including R&D, operation, production, and plant management. Process variation and the measurement system variation can both have an impact on the overall process performance. Process variation can be calculated from the historical data of the production samples. Overall process performance depends on the feed materials, process conditions, product packaging, sample handling and analysis. Measurement system variation can be estimated by gage reproducibility & repeatability (Gage R&R) studies. The objective of this project was to analyze process capability and reduce Boron (B) and Phosphorous (P) in granular polysilicon by controlling process variation. This report includes
(a) the initial analysis of the production samples performed during Phase- 1 (before improvement),
(b) the process improvements that were implemented, and
(c) the analysis of the second set of data from Phase-2 (after the implementation of process improvement), focusing on the B and P impurities.
The justification of this project was to upgrade the quality of the granular polysilicon materials produced from the CVD reactor to meet the internal product specifications, provide high quality materials to the customers, increase sales, and improve the brand.